Facilities:

Click the small images to see bigger images.

 

Deposition Facilities:

  • GSI Ultra High Vacuum Three Chamber Plasma Enhanced CVD Research and development System with Integral Load Lock. Model Number R 200 LL. Recently upgraded to convert the LL chamber into a deposition chamber allowing us to deposit n, i , and p in separate chambers
  • A new hot-wire chamber with coiled filament and multiple gas inlets has been integrated into the GSI system
  • VHF power amplifier (ENI 3100LA and RSG-1000B signal generator) tunable to 100 MHz. Or to 120 MHz with improved matching box.

 
  • ITO sputter deposition facility with one magnetron
 
  • Metal evaporation systems (2 systems)
  • RF (13.56 MHz) Sputter Deposition Facility with two planar magnetron sputter guns and quadruple mass spectrometer
  • RF Sputter deposition facility with two magnetrons
 
  • DC sputter deposition facility with three magnetrons
 
  • Class 100 clean room with submicron mask aligner for patterning ITO electrodes and metal grids

 

Characterization Facilities :

  • Current-voltage (I-V) system for measurements with Oriel 1000W solar simulator, filters for AM0, AM1 and AM1.5 spectrum, keithley source meter for 4-probe measurements, and supplementary tungsten lamp for spectrum matching
  • Spectral quantum efficiency system with Xenon lamp and with voltage bias and light bias, capable of measuring quantum efficiency of component cells in a two-terminal triple-junction or dual junction stacks
  • Light Soaking station

  • Raman/Photoluminescence
  • ISA triple spectrometer system for Raman scattering and photoluminescence, equipped with CCD and photomultiplier detectors, Lexel argon ion, Coherent krypton ion and diode lasers and He refrigerator
  • Dektak3 surface profilometer
  • MMR Hall effect system with temperature variable from -100 C to +100 C
  • Four point probe system for surface electrical conductivity measurements
  • Burleigh instructional scanning tunnelling microscope (ISTM)
  • Thermco three zone semiconductor diffusion furnace (3" diam, 0 to 1000 C)
  • Varian DMS300 double beam absorption spectrometer
  • Perkin Elmer Model 9836 infrared spectrophotometer
  • X-Ray Diffraction-Scintag powder diffractometer

  • SEM with EDS; JEOL 6100
 
  • 1/4 meter spectrometer/spectrograph with PMT and vidicon for emission spectroscopy
 
  • Conductivity and Photoconductivity measurement station, CPM
 
  • Inductively coupled plasma (ICP) spectrometer for elemental analysis
 

 

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